Epitaxial ZnO thin film transistors on 4H-SiC substrates

Epitaxial ZnO thin film transistors (TFTs) were successfully fabricated on 4H-SiC (0001) substrates and characterized. When compared with conventional ZnO TFTs on glass substrates that were prepared in the same fabrication process, the ZnO TFTs on 4H-SiC substrates exhibited improved characteristics, namely, a saturation mobility of 5.41 cm²/V s, a threshold voltage of 2.43 V, and a subthreshold swing of 0.61 V/decade. The ZnO TFTs on glass substrates showed 0.44 cm²/V s, −1.55 V, and 1.13 V/decade. Such improved performance is attributed to the different growth behavior and structural properties of the ZnO channel layers on 4H-SiC substrates. Structural analysis on the ZnO channel layers clearly revealed the epitaxial growth of high-crystalline ZnO along the c-axis on 4H-SiC and the polycrystalline growth on glass substrates. The epitaxial ZnO thin films showed a higher Hall mobility of 24.17 cm²/V s due to less grain boundary and a lower carrier concentration of 6.21×10¹⁵/cm³ resulting from higher crystalline quality with less defects, whereas the ZnO on glass exhibited 6.24 cm²/V s and 2.37×10¹⁷/cm³.

Keywords

• D. ZnO; 
• Thin film transistors; 
• TFTs; 
• Epitaxial growth; 
• 4H-SiC
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    • Source:Sciencedirect
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