Hall-effect characterization of electron transport at SiO2/4H-SiC MOS interfaces

• Inversion layer transport parameters determined using mobility spectrum analysis.

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Mobility extracted from both normally-on and normally-off 4H-SiC MOS structures.

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Broad inversion layer mobility distribution indicates scattering factor >1.

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Trapping at interface reduces the inversion layer free electron sheet density.

Magnetic-field dependent resistivity and Hall-effect measurements combined with high resolution mobility spectrum analysis (HR-MSA) were employed to study room-temperature electronic transport in 4H-SiC metal–oxide–semiconductor field-effect transistor (MOSFET) structures. It is shown that the mobility distribution for electrons at the SiO₂/SiC interface is significantly broader than expected for quantum confined carriers, exhibiting Hall scattering factors significantly greater than the generally assumed unity value. The interfacial electron mobility and Hall scattering factor are likely to be determined by potential fluctuations arising from a disordered transition layer on the SiC side of the SiO₂/SiC interface. For the MOSFET structures studied, charge trapping at the SiO₂/SiC interface was found to determine the interfacial free electron sheet density, in agreement with prior studies on similar device structures. HR-MSA has enabled unambiguous discrimination between electrons in the ion-implanted buried channel layer and at SiO₂/SiC interface in a depletion-mode MOSFET structure.

Keywords

• SiC; 
• MOSFET; 
• Mobility spectrum analysis; 
• Hall-effect; 
• Mobility distribution; 
• Inversion layer
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    • Source:Sciencedirect
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